A new beam deflection angle amplification technique for mirage detection
نویسندگان
چکیده
A new technique has been developed for amplification of the photothermal beam deflection angle for mirage detection. This technique, based on a very simple operating principle, uses a cylindrical reflection mirror. The use of a new amplifier provided a signal-to-noise ratio approximately 10 times that obtained without the amplifier for equipment of the same size. By using the new amplifier, a mirage signal was obtained when a transistor array processed on a silicon wafer was measured.
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